Special servo motor for ultra precision semi conductor equipment SHA series

abstract

SHA series HarmonicDrive and specially designed flat AC servo motor integrated AC servo actuator. Featuring a flat shape and hollow hole structure, it can simplify the overall structure of mechanical devices. SHA-SG type with compact shape as its specialty and improved output

Specialties

HarmonicDrive ® Integrated AC servo actuator with specially designed flat AC servo motor

Hollow and flat structure

Absolute value encoder

SHA-SG: Compact shape with extra length

SHA-CG: For turntable use, improve the accuracy of output shaft surface vibration

1. Model name: AC servo actuator SHA series

2. Model:

SG type=20, 25, 32, 40, 45, 58, 65

HP type=25,32

CG type=20,25,32,40

3. Version symbols

4. HarmonicDrive ® Reduction ratio:

SG type=51,81101121161

HP type=11

CG type=50,80100120160

5. Type of reducer:

SG type=SHG series

HP type=HPF series

CG type=CSG series

6. Motor version symbol:

A=Models 58, 65

B=Models 25, 32, 40

C=Model 20

D=Model 45

7. Motor size:

● 08=Model 20

09=Model 25

12=Model 32

15=Model 40

16=Model 45

21=Models 58, 65

8. Brake:

● A=No brake

● B=With brake

9. Motor power supply voltage:

100=AC100V

200=AC200V

10. Encoder format:

10=symbol A format, transmission speed: 2.5Mbps, 1:1 connection

11. Encoder type and resolution:

S17b=17bit absolute encoder 131072 pulses/rotation

12. Encoder phase angle:

The phase difference A between the U-phase induced voltage of the motor and the absolute origin is 0 degrees

13 connector specifications:

● C=With standard connectors

● N=No connector

D=With special connectors

14. Optional symbols:

L=Near Origin&End Limit Sensor

Y=Cable side exit

● V=With bracket (CG type only)

● S=Output shaft 1 rotation absolute value specification (CG type only)

15. Special specifications:

● No entry=standard product

SP=non-standard product